Welcome to the Global Website

We have detected that you may prefer the Global site. Please use the language dropdown above to change your selection if required.

Go to Global

Semiconductor fabrication PECVD processing solution

Managing low and high temperatures in Semiconductor PECVD processing for solar cell fabrication

Plasma-enhanced chemical vapor deposition (PECVD) processing

The process we describe here is specifically the diffusion and plasma-enhanced chemical vapor deposition (PECVD) for solar cell fabrication. PECVD is a chemical vapor deposition process to grow and deposit ultra-thin films onto the wafer from a gas state.

Quick links:

Semiconductor manufacturing solutions >
Read our semicon interview >
Dry Etch semiconductor solution >
ALD semiconductor solution >
Service Level Agreements >
Custom solutions for OEMs >
Explore our semiconductor application expertise >

Manufacturing challenges
Eurotherm precision temperature and power control
Managing complex cycle stages at low and high temperatures
High accuracy control maintains varying temperature ranges
Temperature disturbances - detrimental to quality and uniformity of wafer
Decisive and fast response to process disturbances
Managing process lags and temperature uniformity between zones
Cascade control regulates spike temperature and profile temperature across zones
Need fast rise to setpoint and precise tracking of desired ramp rates without overshoot
Precision PID control maintains process variables close to setpoint, even during ramps

PECVD vacuum chambers with Eurotherm control solution

  • Typically, two or up to four vacuum chambers per machine
  • Eurotherm true power control
  • Two control outputs with different gain
  • Control of up to four AIN heaters

Discuss your semiconductor requirements







Product Selector

Package icon
Need help choosing the right product?

Our tool will match the best product to your needs

Launch product selector

Contact Us

Request Information

Support Center

Find an Office

close
close

Cookies and privacy

Our website uses cookies delivered by us and by third parties. Some cookies are necessary for the website’s operation, while others can be adjusted by you at any time, in particular those which enable us to understand the performance of our website, provide you with social media features, and deliver a better experience with relevant content and advertising. You may accept them all or set preferences.

Accept All
Reject All

Privacy Settings

Necessary cookies

Necessary cookies are required for our website to work properly and can’t be turned off. They are sent to your computer or device when you request a specific action or service, e.g. when you log in, fill out a form, or set your cookie preferences. If you set your browser to block or alert you about these cookies, certain parts of our website won’t work.

Statistical cookies

Thanks to statistical or analytical cookies, delivered by us and other companies, we can count the visits on our website and know the sources of traffic. The data we derive helps us understand what visitors like most and improve the website. If you don’t accept them, we won’t be able to improve your experience based on data from your visit.

Customization cookies

Customization cookies allow you to configure our website to your preferences (e.g. language, region) and enable enhanced functionalities. They are delivered by us or by other companies. If you don’t accept them, we won’t be able to save your preferences and some services on our website may not be available.

Marketing cookies

Marketing cookies on our website are delivered by other companies and used to identify your interests and display relevant advertising content when you browse outside of our website. These cookies can enable social media features such as sharing and simplifying registration. If you do not accept them, you will still see online ads, but they will be less relevant.

Save Settings